SEM, TEM Preparation

06/01/1998

SEM, TEM preparation

This fully automatic solution for scanning electron microscope (SEM) and transmission electron microscope (TEM) cross-section preparation, straTEM, processes die and wafer segments with a throughput of 15 min/cross-section and 30 min for a TEM pre-preparation. The thinned TEM specimen (20 ?m) is automatically packaged for immediate loading into a FIB station and TEM holder. A software function allows automatic mapping of multitarget segments. SELA USA Inc., Santa Clara, CA; ph 408/988-5151, fax 408/988-3322.