Semiconductor Spectrometry

06/01/1998

Semiconductor spectrometry

The Magna-IR/ECO automated wafer profiling accessory offers users of the Magna-IR spectrometer the option of adding advanced wafer analysis capabilities to their systems. It can perform standard ECO analysis applications on wafers that range from 50 to 300 mm in diam., and automated transmission and reflection analysis at pre-programmed wafer positions. The powerful OMNIC E.S.P. ECO software package controls the new wafer robotics that are integrated into the system. Nicolet Instrument Corp., Madison, WI; ph 608/276-6100, fax 608/273-5046.