wafer transfer system

06/01/1998

Wafer transfer system

The E-8225 BB wafer transfer system reduces airborne contamination, improves reliability, and simplifies installation in new or retrofitted fabs by eliminating the need to run air lines to the equipment. The system automatically rotates every other wafer 180? in back-to-back orientation before transfer to 25-slot plastic cassettes. By rotating wafers so that the front sides face each other, the system protects wafers from back- to front-side cross-contamination in wet processes. E-8225 BB is Class 1-compatible and meets all SEMI standards. Fortrend, Sunnyvale, CA; ph 408/734-9311, fax 408/734-4299, e-mail [email protected], www.fortrend.com.