Crossover photoresist

06/01/1998

Crossover photoresist

AZ 3312 is a high-performance crossover photoresist that offers wide processing latitude in both g- and i-line exposures. In i-line, it is linear to 0.4 ?m and has an exposure latitude of 30% for 0.5-?m lines and spaces (at 1.076-?m resist thickness). In g-line, it is linear to 0.6 ?m and has an exposure latitude of 40% for 0.8-?m lines and spaces (at 1.17-?m resist thickness). AZ 3312 is thermally stable up to 125?C. Clariant AZ Electronic Materials, Somerville, NJ; ph 803/556-7870, fax 803/556-3419.