Photoresist purity

06/01/1998

Photoresist purity

LithoGuard is a small-footprint, modular unit that protects photoresists in DUV steppers and track tools by removing ammonia, amines, and other organics with high-efficiency activated carbon filters, providing contaminant-free air during lithography processing. Donaldson Co. Inc., Minneapolis, MN; ph 612/887-3475, fax 612/887-3612.