Reticle writer

06/01/1998

Reticle writer

The LRS 200 high-precision laser writer is targeted at semiconductor reticle sets down to 0.5-?m design rules and noncritical levels down to 0.25 ?m. The system also meets the requirements of TFT reticles, opto-electronic components, wafer bumping, and other high-precision applications. Included in the system is acousto-optical deflector technology, which - in combination with a fine address resolution of 25 nm - results in good CD uniformity and smooth line edges for curved and angled shapes. The LRS 200 also includes the HyperChannel data path, which eliminates data bottlenecks and results in predictable write times regardless of pattern complexity. Micronic Laser Systems AB, Taby, Sweden; ph 46/8638-5200, fax 46/8638-5290, e-mail [email protected]