Direct wrire laser lithography

06/01/1998

Direct write laser lithography

The DWL400 is a high-accuracy direct write laser lithographic system for the production of high-resolution masks and direct write applications. It can image up to 16 ? 16 in. with sub-?m structure size and resolution. The system includes automatic precision alignment and metrology capabilities. Heidelberg Instruments Mikrotechnik GmbH, Heidelberg, Germany; ph 49/6221-34300, fax 49/6221-343030.