Electrical Characterization facility

06/01/1998

Electrical characterization facility

A technical support and training facility for the electrical characterization of semiconductors has been established at the Technical University Chemnitz, Dresden, Germany, by a US-based company. The service will be located in labs designed to cleanroom standards, equipped with a SSM 495 mercury probe system, and will support university research programs and European customers through such critical semiconductor processing measurements as epi resistivity, ion implant monitoring, gate oxide integrity, and interlayer dielectric properties. Solid State Measurements Inc., Technical Support and Training Facility, Dresden, Germany; ph 49/351-871-8094; fax 49/351-871-8460, e-mail [email protected]