Microchip fabrication volume

06/01/1998

Microchip fabrication volume

Microchip Fabrication: A Practical Guide to Semiconductor Processing, 3d edition, covers material science, maskmaking, contamination control, chemistry, math, and state-of-the-art processes used in wafer fabrication. Specific topics include crystal growth and water prep; process yields; oxidation; photolithography; deposition; wafer test/evaluation; and packaging. Topics new to this edition include multimetal structures; planarization and chemical mechanical polishing; minienvironments; submicron patterning techniques; and productivity factors in wafer fabrication. 623 pages. Price: $60. Peter Van Zant Associates, Grass Valley, CA; ph 530/477-7639, fax 530/272-5103, e-mail [email protected]