Stepper

06/01/1998

Stepper documentation CD-ROM

This cleanroom compatible CD-ROM contains operator manuals, system schematics, and other reference materials for stepper documentation. It enables lithography technicians and equipment engineers in cleanrooms to access vital system information instantaneously, and eliminates bulky printed materials, a possible source of contamination. Digitized media also allows real-time referencing and consultations to boost lithocell productivity, has the potential to reduce downtime, and provides standard guidance for all operators and technicians. Versions of the CD-ROM documentation for step-and-repeat NSR-2205i11 and NSR-2205i12 i-line steppers are available in a number of platforms. Price: No charge for existing NSR-2205i11 and NSR-2205i12 customers; additional copies $2500/disk. Nikon Precision Inc., Belmont, CA; ph 650/508-3819, fax 650/508-4600, e-mail [email protected].