Lithography support Programs

06/01/1998

Lithography support programs

In response to the industry shift to DUV lithography, a US-based company is increasing its technical support options. The service program will expand off-hours response up to 24 hr/day, seven days/week; extend parts availability to parts on consignment; increase on-site service to off-hours and weekends and add an in-house maintenance strategy; set up critical service hot lines; and improve on-line technical support. The program will also be tailored by locality according to customer needs and the number of installed machines. Bilingual staff members will be available, and an electronic service order filing system will help eliminate paperwork and possible delays. Canon USA Inc., Semiconductor Equipment Division, Santa Clara, CA; 972/409-7845 or 972/409-7841.