GaSonics International / Chartered Semiconductor Manufacturing

05/01/1998

GaSonics International, San Jose, CA, has received an order from Chartered Semiconductor Manufacturing (CSM), Woodlands, Singapore, for a performance enhancement platform 3600 system, which features two residue removal/isotropic etch process chambers. The system, which will be installed at CSM and Lucent Technologies` joint venture Silicon Manufacturing Partners, will be used to manufacture devices with 0.25-?m design rules.