MEGA Systems & Chemicals, Inc. / National Semiconductor

05/01/1998

MEGA Systems & Chemicals Inc., Chandler, AZ, has shipped a total CMP system to National Semiconductor`s South Portland, ME, facility. The order includes two MEGAflow IIIC high-flow systems, which minimizes slurry hardening through continuous recirculation; a MEGApure 100, which provides submicron particle filtration and dispense; a MEGAview monitor system; and a MEGAlink process equipment interface system.