Cleanroom robot

05/01/1998

Cleanroom robot

The new six-axis SV3CR robot is designed specifically for use in a Class 1 cleanroom environment. It is ideal for high-speed maching loading, including the handling of disk drive media, flat panel displays (FPDs) and wafers up to 300 mm. The robot can also be used for cassette handling in interbay applications and is integrated with a vision or laser-sensing package for wafer mapping functions. Features include a 3-kg payload capacity, a reach of 677 mm, a repeatability of ?0.03 mm and reliable high-performance AC Sigma servo motors. Weighing only 30 kg, the robot is easily mounted on top of a table or on other mounting platforms such as a servo track. Motoman Inc., West Carrollton, OH; ph 937/847-3300.