Microfiltration technology
05/01/1998
Microfiltration technology
Exxflow is a microfiltration technology that builds a dynamic filtration layer from the natural precipitate of solids present in the process solution on a fabric membrane. The system is well suited to treating and recycling wastewater that contains suspended particles present in wafer manufacturing processes. Systems can be installed on wafer dicing saws reclaim, backgrind, polishing, CMP and other slurry waste streams. Kinetico Inc., Newbury, OH; ph 800/633-5530, www.kinetico.com/esd.htm, e-mail [email protected].