FPD/300-mm interstep cleaning

05/01/1998

FPD/300-mm interstep cleaning

The Microclean 960 series tools clean large substrates, including flat panel displays up to 1000 ? 1000 mm, and 300-mm wafers. The fully automatic tools are available in both ultrasonic and megasonic configurations. Process baths can be fabricated in quartz, PFA, ECTFE, PVDF, or 316 stainless steel. High-temperature piezo bonding technology provides continuous processing temperatures to 120?C. The megasonic system deploys a higher operating frequency, translating into oscillation of the liquid closer to the substrate surface. This provides agitation and more efficient removal of particles down to 0.05 ?m at 99% efficiency. Polypros Inc., Roseville, CA; ph 916/786-7000, fax 916/786-8640.