FPD stepper

05/01/1998

FPD stepper

Model 6700 PanelPrinter provides high-performance, wide-area lithography capability for Gen 3 and Gen 3.5 flat panel production. Using the field-proven Model 5200 tool architecture and the new AccuStep x-y stage motions, the 6700 meets a wide range of high-performance production lithography goals. The system is particularly suited to FED and low-temperature polysilicon display production applications. When equipped with an i-line lens, the 6700 is also suitable for patterning photo-definable dielectrics and color filter resist materials. MRS Technology Inc., Chelmsford, MA; ph 978/250-0450, fax 978/256-3266, e-mail [email protected], www.mrst.com