Vacuum process cold traps

05/01/1998

Vacuum process cold traps

The CT-Series cold traps provide solutions for pumping condensables such as the products of TEOS deposition. The systems are available with -60 or -110?C minimum temperatures, and cooling powers of 62 W at -45?C and 60 W at-90?C, respectively. Capacity is 1.5 kg of ice. Four trap systems are available, varying in automation and regeneration downtime. Automated units are programmable for regeneration frequency and interface with system controls for process and alarm interactions. ATRInc., Laurel, MD; ph 301/470-2799, fax410/792-2837.