KrF excimer laser

05/01/1998

KrF excimer laser

The ELS-5010 KrF excimer laser is a light source targeted at the scanner platform for DUV lithography systems. Key features of the system - which improves upon its predecessor, the ELS-5000 - are spectral purity bandwidth for greater resolution capability, and energy stability for critical dimension control. Cymer Inc., San Diego, CA; ph 619/451-7149, fax 619/618-3035.