Scan controller

05/01/1998

Scan controller

The CX-2R ion implanter beam scan controller upgrade compensates beam motion to improve nonuniformity for each of two end stations. It reduces channeling up to 5?, eliminates micro nonuniformity of 3% at 400-?m scale, and cuts time to 5 sec. Features include a double image compensator and auto switch. The CX-2R upgrades the Varian 300XP to 0.3 ?m and also fits the 350D. Fab-m Corp., SanFrancisco, CA; ph 415/567-8504, [email protected].