Wafer/mask microscope

05/01/1998

Wafer/mask microscope

The INM 100 modular microscope, for wafers and masks, features fingertip operation, an 8-in. stage, a tilting viewing head, a motorized objective nosepiece, an aperture diaphragm, and Class 1 compatibility. Its HCS optical system produces the highest resolution and contrast images in all illumination modes, with improved TV imaging for digital recording applications. A retrofitable confocal module with improved brightness and contrast is also available. The INM 100 features a high-precision, motor-driven focus drive with selectable fine focus and integrated safety stop. The transmitted light option produces a compact and simple mask inspection tool. Leica Microsystems Inc., Deerfield, IL; ph 800/248-0123, fax 847/405-0147, e-mail [email protected], www.leica.com.