300-mm wafer inspection

05/01/1998

300-mm wafer inspection

Constellation is a fully automated inspection tool for both 200- and 300-mm wafers. Its inspection station employs advanced optical scanning hardware and sophisticated data analysis software to analyze and characterize multiple classes of surface defects on both polished and epi wafers. Wafers are handled and inspected in the horizontal orientation, using a high-speed, multiple-axis robot to transfer wafers from their cassettes to the inspection gauge and back. Constellation`s modular design allows for multiple cassette sorting capability in a minienvironment. ADE Corp., Westwood, MA; ph 781/467-3747, fax 781/461-1575.