Vacuum abatement system

05/01/1998

Vacuum abatement system

The VAS combines a vacuum system and waste gas incineration system with integrated scrubber, a neutralization and washing cycle, and a monitoring and control unit (compatible with any vacuum pump model). It abates Cl2/BCl3 and CF4/SF6 effluent from a metal dry etch process at efficiencies of >99% and 98%, respectively. Using DAS ESCAPE NET software, multiple VAS can be networked for centralized administration/control. DAS GmbH, Dresden, Germany; ph 49/351-871-8688, fax 49/351-871-8726, e-mail [email protected].