Residual gas analyzer

05/01/1998

Residual gas analyzer

The HPQ2 is a high-pressure residual gas analyzer (RGA) that does not require a support pumping package and offers a high level of performance and control. It is provided with Process Eye software, an advanced Windows-based PC package dedicated to process monitoring, vacuum maintenance, and RGA applications such as photoresist detection. Spectra International, Morgan Hill, CA; ph 408/778-6060, fax 408/776-8575.