Lithography simulation software

05/01/1998

Lithography simulation software

Version 6 of PROLITH/3D and PROLITH 2 includes new lithography models, such as the step-and-scan exposure tool model, the notch resist development model, and a chemically amplified resist model. The user interface has been rewritten as a native Windows product on the PC platform (PROLITH is also available on the Sun Workstation and the DEC Alpha). Version 6 also features OptiPRO technology, which increases the problem-solving speed of the software by taking advantage of the capabilities of each individual computer. FINLE Technologies Inc., Austin, TX; ph 512/327-3781, 512/327-1510, www.finle.com