Process monitoring/device characterization

05/01/1998

Process monitoring/device characterization

KTE Version 3.2 software is used with parametric test systems such as the S400UX and the S600 APT, providing features that include Smart Sampling, user access points, and automatic configuration functions. This speeds wafer processing, increases the value of test data, and reduces programming overhead. An easy-to-use graphical interface controls all measurement instruments, matrix switching systems, and probe stations. The Smart Sampling feature allows users to create test sequences in which each cassette, wafer, and subsite (or die) can have a unique test plan - different sites and subsites can be chosen on different wafers, for example. The flexible sampling features of KTE 3.2 obviate the need for excessive testing when initial samples indicate acceptable quality in a production lot. This is particularly valuable for long-duration tests such as QBD (charge to breakdown). Keithley Instruments Inc., Cleveland, OH; ph 440/248-0400, fax 440/248-6168, e-mail [email protected],www.keithley.com