300-mm wafter carrier technology

05/01/1998

300-mm wafer carrier technology

CAPSil M325 is a SEMI-compliant, 25-capacity front opening unified pod (FOUP) that addresses such issues as 0.13-?m linewidths and copper processing. It has pistol-grip handles that are adjustable from 0 to 20? (horizontal), giving the user a choice of position. Manual handling can be eliminated in less than 60 sec by removal of the handles (without need of tools). The M325 offers manual door opening and closing; the door can also be removed easily. Bar code, IR, or RF tag tracking solutions are integrated into the design - the bottom rear of the kinematic coupler plate assimilates provisions for a permanent bar code holder, a socket for a radio frequency transponder, and slots to accommodate infrared displays. Hot wafers can be placed directly into the FOUP (and the door immediately closed) because the M325 is constructed from high heat-resistant PEEK. A "Faraday" cage type design protects against electrostatic discharge events, and the sealed FOUP can be purged with inert gas, such as nitrogen or argon. Empak Inc., Colorado Springs, CO; ph 719/528-2725, fax 719/528-2690, www.empak.com