Literature Update
04/01/1998
Ultra-high-purity gas filter brochure
This full-color brochure describes a line of filters available in 3-, 5-, and 11-in. lengths for ultra- high-purity gas filtration requirements. Each housing of the
Ultra-Series filters is made of 316L VAR stainless steel and all internal surfaces are electropolished to a surface finish of =7 Ra and a Rmax of less than 10 ?in. The filters contain a proprietary ceramic membrane with a total flow area of 6-450 cm2 depending on size. Four connection styles are available: Male Face Seal, Compression, Tube Stub, and O-Ring Seal designs. Assembled in a Class 100 cleanroom, the filters will not react with most process gases or generate gaseous impurities. Ultra-Series assemblies are 100% helium leak tested prior to shipment. Parker Hannifin Corp., Finite Filter Division, Oxford, MI; ph 800/521-4357, fax 248/628-1850, www.parker.com.
Filter products brochure
This full-color brochure presents a line of microfiltration products, including stainless steel housings. Products highlighted for microelectronics manufacturing include the STyLUX polyethersulfone
membrane filter, which features a permanently hydrophilic membrane with chemical compatibility; the Chemdyne polypropylene membrane filter, which features a hydrophobic, porous membrane with chemical compatibility; and the Ultradyne PTFE membrane filter,
which features a hydrophobic, porous membrane and chemical compatibility with minimal extractables in a range of fluids and applications. Also highlighted are product configurations for point-of-use through bulk applications. Meissner Filtration Products Inc., Camarillo, CA; ph 805/388-9911, fax 805/388-5948.
Temperature control data sheets
This series of data sheets describes a line of temperature control systems for the semiconductor industry. Single and dual channel systems are offered for DI water/glycol and perfluorinated fluids. Leak-free performance is achieved via the use of magnetically coupled gear pumps and custom-designed "O"- ring fittings to eliminate all thread, compression, and hose clamp fittings. Temperature ranges from -40?C to +130?C are available, and systems have been designed to match the needs of most commercial etch, CVD, RTP, CMP, and other process systems. All instruments are SEMI-S2-93 and CE certified. Bay Voltex Corp., Livermore, CA; ph 510/606-6293, fax 510/606-6297.
Vacuum pump rebuilding brochure
This four-page brochure describes a service for rebuilding vacuum pumps ranging from conventional belt drive models to those using dry pump technology. Pumps are disassembled, inspected for wear and damage, and cleaned and decontaminated. Defective parts are replaced as necessary and then rebuilt to OEM specs, tested, and often repainted, fitted with new belts, and the ports are sealed. The brochure also features an overview of vacuum pump protection products, including vacuum inlet traps, oil filtration systems, and oil mist eliminators, and provides a parts inventory that includes motors, shafts, vane springs, pins, bearings, bushings, exhaust valves, gaskets, and seals. Mass-Vac Inc., No. Billerica, MA; ph 978/667-2393, fax 978/671-0014, e-mail [email protected].
Metrology data sheet
This data sheet features SpectraLASER 200 transparent film metrology systems for semiconductor process control. The systems ensure repeatable t, n, and k measurements, and have small spot size, high optical intensity, and a high throughput of 100 wafers/hr. The series employs multidomain production ellipsometry, which combines the power of multiple wavelength and multiple angle of incidence data, to characterize new semiconductor manufacturing processes accurately, as well as to monitor existing ones. Featuring stable laser light output with long (20,000-30,000 hr) source lifetimes, the instruments provide system-to-system matching and measurement stability. For antireflective coating process development and daily monitoring, the systems offer the added capability of a deep-UV reflectometer. They also share a common automation platform with the MetaPULSE 200 metal film measurement system. Rudolph Technologies Inc., Flanders, NJ; ph 973/691-1300, fax 973/691-5480.
Plasma power supply brochures
Two brochures (AE 5600038 and 5601002) describe the PDX series of lightweight, compact, CE-certified, mid-frequency power supplies for plasma processes. The power supplies have an actual MTBF of more than 1 million hr in the field, are easily integrated, and provide precise power for such applications as plasma-enhanced CVD, etching, dielectric sputtering, and plasma polymer processes. The single-phase input PDX offers outputs of up to 1250 W, with a frequency range of 325-450 kHz, whereas the three-phase input PDX delivers up to 8000 W, with a range of 235-460 kHz. Other features of the series include sinusoidal RF output with low harmonic distortion; operation over a wide frequency range; tight output power regulation based on user setpoints; internal loadmatching; almost no stored energy at the output; and arc suppression that reacts in less than 2 msec. Advanced Energy Industries Inc., Fort Collins, CO; ph 970/221-4670, fax 970/221-5583, www.advanced-energy.com.
Vacuum seal brochure
This six-page, four-color brochure highlights ceramic-to-metal and glass-ceramic components for ultrahigh vacuum applications. Ceramic-to-metal components are designed to withstand demanding manufacturing environments, including extreme heat, severe cold, high voltage, and ultrahigh vacuum. Glass-ceramic products combine the mechanical and electrical properties of ceramic with the design flexibility of glass, withstanding higher temperatures than many glass designs, and achieving higher multiconductor densities than conventional ceramic-to-metal components. Also featured in the brochure are manufacturing services and quality assurance processes. Ceramaseal, New Lebanon, NY; ph 800/752-7325 or 518/794-7800, fax 518/794-8080, www.ceramaseal.com.
FIB workstation data sheet
This data sheet describes the FIB 200xP focused ion beam workstation developed for R&D, failure analysis, design verification, and surface science. The compact tool is designed for accurate milling and deposition within submicron tolerances, and produces high-resolution, high-contrast images. Equipped with a high-stability, 5-axis, tilt-eucentric stage, it provides on-target navigation and specimen manipulation across specimens up to 50 ? 50 mm, and is able to handle such samples as packaged semiconductor parts, wafer sections, and circuit boards. The FIB 200xP operates with Windows NT-based, icon-driven graphical user interface. FEI Co., Hillsboro, OR; ph 503/640-7500, fax 503/640-7509, e-mail [email protected].
Scanning probe microscope brochure
This full-color brochure describes a line of scanning probe microscope (SPM) products for industrial and research applications. Systems are available for analyzing samples of any size, and offer all SPM operating modes, including atomic force microscopy (contact and noncontact nodes); lateral force microscopy; scanning thermal microscopy; magnetic force microscopy; and scanning electrical potential microscopy. Also detailed
are two near-field optical microscopes that break the diffraction barrier to optical microscopy and allow magnifications higher than those possible with conventional optical microscopes. In addition to ultrahigh resolution optical data, these systems simultaneously provide 3-D topographic information. TopoMetrix Corp., Santa Clara, CA; ph 408/982-9700, fax 408/982-9751.
1998 test and measurement catalog
This 700-page catalog features test and measurement instruments, including electrometers, precision sources, voltmeters, picoammeters, ohmmeters, source-measure units, and semiconductor characterization systems. It provides detailed information and complete specs on product offerings, and also contains a selection guide and technical information to aid users in choosing the proper equipment for their applications. Keithley Instru-
ments Inc., Cleveland, OH; ph 800/552-1115 or 440/248-0400, fax 440/248-6168, e-mail [email protected], www.keithley.com.
Motion control product guide
This 16-page, full-color guide highlights a line of PC-based motion controllers, application software, linear motors, brushless rotary motors, drives, and indexers. The products are low cost and easily integrated into existing machine automation systems. Aerotech Inc., Pittsburgh, PA; 412/963-7470, fax 412/963-7459, e-mail [email protected], www.aerotechinc.com.
Nanopositioning motor catalog
This 28-page catalog describes a line of Inchworm nanopositioning systems for use in such applications as optical lithography and semiconductor inspection. The systems are designed to operate in high and ultrahigh vacuum environments, and feature continuous ultrahigh resolution over many millimeters of motion; high acceleration and velocity; no backlash, drift, or vibration; high mechanical stability; and compact geometry. Also included in the catalog is a section explaining how to configure an Inchworm nanopositioning system from the range of motors, stages, encoders, mounting hardware, and controllers available. Burleigh Instruments Inc., Fishers, NY; ph 716/924-9355, fax 716/924-9072, e-mail [email protected], www.burleigh.com.
Vacuum component data sheet
This data sheet describes a line of vacuum flanges. The VacuComp series 31 KF 80 and 100 flanges are designed in the same style as the rest of the VacuComp series 31 line, but are available in sizes larger than the ISO standard (NW 80, 3 in. and NW 100, 4 in.), allowing for greater conductance. Made from high-purity stainless steel, the components are cleaned and packaged for high-vacuum use. The data sheet also contains part numbers, prices, and dimensions. MKS Instruments HPS Division, Boulder, CO; ph 800/345-1967 or 303/449-9861, fax 303/442-6880.
1998 test and measurement catalog
This 640-page catalog describes more than 1400 test and measurement products, systems, and services. Along with descriptions and technical specs of standard products and systems, the catalog includes product comparison charts; tutorial material; indexed lists of application notes, and descriptions of other available literature, such as newsletters and specialty catalogs. It is available in English (Literature 5965-9600EUS) or Japanese (Literature 5965-9600JJP). Hewlett-Packard Co., Palo Alto, CA 94304; ph 800/452-4844 ext 5766, www.hp.com/go/tmc98.
Optics capabilities brochure
This 12-page, color brochure details a manufacturer`s capabilities in laser-grade optical coating and fabrication. UV product lines include high-damage-resistance excimer laser
optics such as mirrors, output couplers, lenses, windows, beam splitters, and polarizers, on fused silica, MgF2, and CaF2 substrates. Coatings for solid state and ultrafast laser components, ranging from the UV through the near IR, are among other products listed. The manufacturer`s quality control testing lab, which contains a UV-enhanced Hitachi U-4001 spectrophotometer and Wyko dual-beam phase-measuring interferometer, is also described. Alpine Research Optics, Boulder, CO; ph 303/444-3420, fax 303/444-1686, e-mail [email protected].