RGA process monitoring

04/01/1998

RGA process monitoring

The Vision 1000-P RGA process monitor, which consists of a compact Smart Head RGA with a PVD ion source and close coupled inlet, provides a simple go/no go display. Fault conditions or deviations from a "normal" event generate screen messages explaining the deviation and the likely cause and solution. A key element of the system is Process Eye software, a process control package that lets the engineer characterize known good profiles of baseline and process conditions, for ongoing reference. Process monitoring recipes are created and may incorporate customized warnings and alarm levels, which are triggered whenever the process exceeds preset standard deviation levels. Once the recipe has been handed over to production, decisions based on the interpretation of RGA data are removed from the operator, since Vision 1000-P interprets data from the characterization database. Spectra International/

Leda-Mass, Knutsford, UK; ph 44/1270-250150, fax 44/1270-251939, e-mail [email protected].