Furnace series

04/01/1998

Furnace series

NOBLE wafer-processing furnaces consist of three series. (Single or multiple stacks are available for all diffusion and LPCVD applications.) The IPS Series 26 is a complete furnace processing system with an automated loading bay, gas controls, and process chamber. It provides full dimensioning and specifications for processing wafers from 50 to 150 mm. Series 812 provides small-batch processing for 200- and 300-mm wafers in a fully integrated, small-footprint package. The BT (bench top) furnace range is designed for projects that can be customized and configured for the requirements of R&D. Canary Technology, Fremont, CA; ph 510/803-2173, fax 510/829-5723, www.canarytech.com.