CO2 snow precision cleaning

04/01/1998

CO2 snow precision cleaning

The Eco-Snow "dry" cleaning process, with applications ranging from semicon-ductors to FPDs and disk drive media,uses liquid CO2 to remove submicron particulates, thin organic films, and photoresist residues. The liquid is expanded through special nozzles to generate a fast-moving stream of "snow flakes" and carbon dioxide gas. The snow flake impact momentum transfer dislodges particulates, which are then swept away in the gas stream. The system removes photoresist residues and microscopic veils by a combination of thermal delamination and directed spray. ATS Eco-Snow Systems Inc., Cambridge, Canada; ph 519/653-6500,e-mail [email protected], www.eco-snow.com.