Residue removal buffer

04/01/1998

Residue removal buffer station

This new option for the PEP Package Solution, which was developed for the strict requirements of critical post-etch residue removal and photoresist removal process steps, is designed for =0.25-?m geometries. The Queue is a buffer station that allows a total of six cassettes to be staged onto the PEP for more than one hour of continuous, steady-state processing. Each of the cassettes can be independently programmed for resist removal or resist removal and post-etch residue removal

processes. GaSonics International, San Jose, CA; ph 408/570-7000, fax 408/570-7059, www.gasonics.com.