CMP slurry system

04/01/1998

CMP slurry system

The MEGAjet mixing system is designed for correct blending of slurries that are challenging to dispense while maintaining a uniform suspension of the abrasive. Inside the tank, patterned flows are created without mechanical mixing to move the slurry from top to bottom and in a circular motion, creating a cleaning action on the tank walls and reducing the chance of buildup. MEGAjet`s style of mixing eliminates such problems as contamination, air infiltration, vibrations, and high maintenance. The motion of the fluid creates the mixing energy, so there are no moving parts, vortex motion, or contaminating materials. MEGA Systems & Chemicals Inc., Chandler, AZ; ph 602/437-9105, fax 602/705-4319, www.megasyschem.com.