Surface profiler

04/01/1998

Surface profiler

The WYKO SP3000 surface profiler expedites process control of large-format samples with accurate, noncontact 3-D data. Designed to enhance yield and improve in-line process monitoring of flip-chip packaging, the gauge-capable profiler enables users to control critical dimensions and determine the electrical/mechanical performance and reliability of advanced packaging substrates. Combining vertical scanning interference microscopy with proven, extensive analysis software, the system measures surface heights up to 2 mm with sub-nm precision. An ergonomically designed operator console and production interface provide one-button operation, simplifying operator interaction and eliminating operator variability. Fully automated focus, intensity, and x, y, z axes make the SP3000 production-worthy in high-volume manufacturing. Veeco Process Metrology Group, Tucson, AZ; ph 520/741-1044, fax 520/294-1799, www.veeco.com.