Semiconductor surface preparation book

03/01/1998

Semiconductor surface preparation book

This 545-page volume titled Science and Technology of Semiconductor Surface Preparation documents symposium proceedings from the 1997 MRS Spring Meeting in San Francisco, CA. Its focus is to bring researchers and manufacturing and development engineers together to report new findings and to discuss surface preparation with an emphasis on gaining a mechanistic understanding of the underlying science on which the technology is based. Topics include megasonic cleaning; SC1 technology; surface preparation and gate oxide reliability; CMP/CMP cleaning; post-etch processing; surface microroughness; wet chemical cleaning and gate oxide integrity; analytical studies of surfaces; wet chemical cleaning/etching; dry wafer cleaning; and environmentally friendly processing. ISBN 1-55899-381-9. Price: $60 (MRS members), $68 (US list), and $79 (non-US list). Materials Research Society (MRS), Customer Services Dept., Warrendale, PA; ph 412/779-3003, fax 412/779-8313.