Metrology software

03/01/1998

Metrology software

Version 4.0 of WAFERMAP software allows import of data files from metrology tools such as ellipsometers and four-point probes. The data can be visualized by contour plots, 3D plots, line scans, and histograms. Features include rotation, shift, and mirroring of the grid. For simulation of wafer rotation in deposition or RTP equipment, it is possible to average radial zones. Manuela Boin Scientific Software, Tomerdingen, Germany; ph 49/7348-928233, fax 49/7348-928234, e-mail [email protected].