Dry pumps

03/01/1998

Dry pumps

The iL70 drypump, targeted at clean processes, is designed for loadlock, transfer chamber, PVD, SEM, and similar applications. The iH1000 heavy-duty oil-free pump provides high-speed pumping for difficult processes such as etch and CVD in silicon wafer and FPD manufacture. BOC Edwards, Crawley, UK; ph 44/1293-528844, e-mail [email protected].