Compact process ion gauge

03/01/1998

Compact process ion gauge

The IMR 260 process ion gauge, designed for vacuum deposition processes, combines hot cathode ionization and Pirani gauges in one housing, with an expand measuring range to 10-6 - 1000 mbar. The Pirani gauge signals the on-board electronics, which act as the controller for the hot filament, sending it a signal when to turn on and off, virtually eliminating burnout. The gauge has good reproducibility of ?2% from 10-5 to 0.1 mbar, covering the whole range of sputtering and reactive evaporation processes. Pfeiffer Vacuum Technology Inc., Nashua, NH; ph 603/578-6500, fax 603/578-6550, www.pfeiffer-vacuum.com.