Wide range manometer

03/01/1998

Wide range manometer

The ATMION system measures pressures from atmosphere to 10-9 mbar with a single gauge by automatic switching between Pirani and Bayard-Alpert principles. The gauge is inserted in a protective adaptor (different KF or CF flanges available) with a grid toward the vacuum. This increases the accuracy and reproducibility of pressure readout and allows operation of the gauge during sputtering and plasma processes. The power supply/controller is directly positioned at the gauge head and is provided with an analog output and RS 232 or 485 serial interface. VACOM GmbH, Jena, Germany; ph 49/3641-4275-0, fax 49/3641-4275-24, www.vacom.de, e-mail [email protected].