Vacuum pumping systems

03/01/1998

Vacuum pumping systems

On-Board TurboPlus vacuum pumping systems allow deposition processes to be performed at lower background pressures and save time in tool pumpdown to base pressure following atmospheric exposures. The systems are also effective for loadlock or transfer module applications requiring lower pressure and faster pumpdowns. With more than 3800 l/sec net water pumping speed for the 10-in. OD ConFlat and ISO 200 versions, these systems are <1 in. higher than comparable turbopumps. They operate from a standard helium compressor, allowing easy pump interchanges within an established tool`s design envelope. CTI-Cryogenics/Helix Technology Corp., Mansfield, MA; ph 508/337-5224, fax 508/337-5464.