Etcher upgrade

03/01/1998

Etcher upgrade

The TadiVac2000 system/process monitor is designed to monitor and store all critical process parameters for the Tegal 900 series etcher. It will also "alarm" when endpoint slope varies beyond the predefined specification. All critical parameters are collected and stored to disk at a rate 10 times/sec, for more than one year. Kurt J. Lesker Co., Clairton, PA; ph 800/245-1656, fax 412/233-4275, www.lesker.com.