Wet process station

03/01/1998

Wet process station

Model 260 is a wet process station, available in lengths of four, six, or eight feet and fabricated from type 304 stainless steel (0.074 thk) with #4 finish. Features include filtered quartz etch tanks, ultrasonic tanks, wafer spinners, rinser dryers, dump rinsers, chemical feed systems, lip exhaust features, and a full-length tub below the work surface with a 1.5-in. NPT drain and exhaust ports connected to the plenum. Victor Assoc., Ivyland, PA; ph 215/443-5664, fax 215/443-5666