Grazing reflection metrology

03/01/1998

Grazing reflection metrology

X-CALIBER is a grazing reflection metrology tool for the precise and rapid measurement of film or substrate density, linear thin film thickness, and surface and interfacial microroughness. The tool`s optics provide standardless measurements in 10 sec, making multipoint mapping a routine operation, and its noncontact and nondestructive operation is suitable for single-layer and multilayer metal films, as well as dielectrics. Density and surface microroughness measurements can also be made on bulk materials such as silicon or gallium arsenide wafers. AXIC Incorporated, Santa Clara, CA; ph 408/980-0240, fax 408/980-0524, www. axic.com.