Cluster tool systems`

03/01/1998

Cluster tool systems

The EV155 automated resist processing system provides spin coating, curing, and developing of photoresists for single wafers and substrates; the EV160 automated developing system provides automated resist developing for wafers and substrates. Both systems easily handle standard and nonstandard wafers and substrates with the versatility of applying thick and thin resists and spin-on films. The coating module on the EV155 accommodates multiple resists of varying viscosities and supports a variety of coating methods. Up to 24 modules for vapor primer, proximity bake, and cooling can be incorporated for high throughput and high precision process control. Electronic Visions Inc., Phoenix, AZ; ph 602/437-9492, fax 602/437-9435, e-mail [email protected].