SMIF wafer sorter

03/01/1998

SMIF wafer sorter

The MVT 7080 SMIF wafer sorter quickly and safely sorts, splits, merges, or randomizes 75- to 200-mm-wafer lots at rates up to 300 wafers/hour. The system features: a four-axis robotic handler with an integrated laser mapping system and a dual-paddle design for high throughput; a high-speed aligner and integrated wafer ID reader with advanced illumination for accurate and repeatable optical character recognition; a state-of-the-art SMIF enclosure and particle filtration (=0.128 ?m, =1/wafer); a fast and accurate pod I/O port; a small footprint - front-loading or other configurations available, with two, three, or four cassettes; and a choice of cassette tracking systems. MicroVision Corp., Chanhassen, MN; ph 612/975-9911, fax 612/975-9922,e-mail [email protected].