Closed ion source gas analyzers

03/01/1998

Closed ion source gas analyzers

The CIS series closed ion gas analyzers offer better than 1 ppm detection limit for all gases and direct sampling at mtorr pressure. A real-time Windows software package is provided for on-line process monitoring and control, gas purity verification, residual gas analysis, and leak checking applications. The systems have a mass range up to 300 amu, complete programmability, and multiple head operation. Stanford Research Systems Inc., Sunnyvale, CA; ph 408/744-9040, fax 408/744-9049.