Defect review and inspection tool

02/01/1998

Defect review and inspection tool

The SEM-based XL850 defect review and inspection tool, a Class 1 cleanroom-compatible system with a robot cassette loader, is designed for evaluation, yield management, and failure analysis applications supporting design rules to 0.18 ?m and beyond. The tool provides high resolution and low-voltage operation, with 3-nm resolution from 1 to 30 kV; this performance is achieved even up to a 60? tilted view and a very short 5-mm working distance. The operator can switch directly between field-free mode and immersion mode. The new electron column offers balanced-field, in-lens detection of both backscattered and secondary electrons to give very good topographical detail, down-hole visibility, and enhanced grain boundary imaging. FEI Co., Hillsboro, OR; ph 503/640-7500, fax 503/640-7509.