Issue

Advanced spectroscopic ellipsometry

02/01/1998

Advanced spectroscopic ellipsometry

ASET-F5 is a thin film tool that meets the requirements of 0.15 and 0.13-?m device generations, collecting measurement data across a continuous wavelength spectrum from 193 to 800 nm. It combines broadband spectroscopic ellipsometry with dual-beam spectrophotometry for simultaneous measurement of multiple film attributes, thickness, refractive index, and extinction coefficients of single- or multilayer thin film stacks without referencing or extrapolation. The ASET-F5 features a new modular handler, in either 200- or 300-mm configurations, which is available with 200-mm dual open cassettes or single SMIF interface and 300-mm single or dual SEMI E15.1 load ports. The handler, combined with the system software, gives throughput up to 130 wafers/hour. KLA-Tencor Corp., San Jose, CA; ph 408/875-4200,