CMP slurry filtration

02/01/1998

CMP slurry filtration

Due to their tangential flow, Spiraltek filters meet the special requirements of CMP slurries. Unlike conventional filters, they retain gelatinous material and prevent premature plugging. Agglomerations are swept from the filtering surface and held inside the filter, leaving the surface free for more filtration. The filters have very high dirt-holding capacity, providing up to six times the life of standard pleated cartridge filtration. Osmonics, Minnetonka, MN; ph 800/848-1750, fax 612/933-0141, www.osmonics.com.