PVD sputtering system

02/01/1998

PVD sputtering system

The Eclipse Mark IV is an ultrahigh-vacuum (UHV), serial indexing, vertical PVD sputtering system with an advanced digital control system, user-friendly software, and chamber geometries for 200-mm wafers. It has a flexible platform that can be custom-configured for a wide variety of metal applications, including interconnects, barriers, silicides, conductors, and packaging and GaAs. Other features include innovative wafer handling and clamping equipment, quick-change target tooling, UHV process chambers, ultraclean process gas lines and flow control systems, and advanced cathode and shield technology. Materials Research Corp., Gilbert, AZ; ph 602/507-4937, fax 602/507-9374.